OIPT supplies plasma etch & dep systems to ITRI for micro-LED R&D

UK-based plasma etch and deposition processing system maker Oxford Instruments Plasma Technology (OIPT) says that Industrial Technology Research Institute (ITRI) of Hsin Chu, Taiwan has selected multiple PlasmaPro 100 systems (including both etch and deposition systems) for its micro-LED R&D program.

“ITRI has a close collaboration with Oxford Instruments due to their cutting-edge technology, but this is not the only reason we chose them to supply our latest system,” comments Dr Fang, deputy division director, Electronics and Optoelectronics System Research Laboratories. “Their application solutions, unrivalled local process support and their capability to nurture laboratory developments into production standards with our industrial partners were key influences in our purchase decision.”

The PlasmaPro 100 ICP process solutions are designed to support leading-edge device applications such as lasers, RF, power and advanced LEDs.

“ITRI has chosen to partner with OIPT in the next exciting phase of development of LEDs with this development program for micro-LEDs similar to those used to demonstrate Samsung’s Wall TV,” says OIPT’s strategic marketing manager Robert Gunn. “ITRI is the latest to join many research institutes and start-up companies in adopting OIPT process solutions for this rapidly growing market.”

Tags: OIPT

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